PICOPROBE® Models 7/7A | Coaxial RF Micro Probe
- ✓ Probes for On-Wafer Probing – Model 7 with 50 Ohm Termination
- ✓ Model 7A for Capacitance and Resistance Measurements
Coaxial Micro Probe for On-Wafer Probing and IC Characterization up to 500 MHz
Coaxial Micro Probes for DC to 500 MHz, IC Testing, and On-Wafer Probing
The PICOPROBE® Models 7 and 7A from GGB Industries are coaxial micro probes for precise contact on integrated circuits, wafers, and test structures. They were developed as companion probes to the PICOPROBE® Models 12C and 18C to drive IC lines in a targeted way and evaluate the response of adjacent nodes with suitable measurement probes.
The probes are suitable for applications in semiconductor development, IC characterization, failure analysis, research, education, and industrial test engineering. They can be mounted on micropositioners and integrated into existing wafer probing systems.
Model 7 for Controlled Signal Drive, Stable Signals, and Reduced Coupling
The PICOPROBE® Model 7 consists of a flexible, 6 ft long 50 Ω coaxial cable that is precisely terminated to 50 Ω. This reduces unwanted reflections in the test setup, especially when driving signals on IC lines and test nodes.
A special miniature connector accepts replaceable coaxial probe tips. These guide the shielding to within 3 mm of the fine tungsten tip and thereby minimize capacitive coupling to adjacent circuit areas. The probe tips are available with different tip diameters and can be geometrically adapted to various probing tasks.
Model 7A: High-Impedance Version for Capacitance, Resistance, and Slower Signal Applications
The PICOPROBE® Model 7A is the high-impedance version of Model 7. It is suitable for capacitance measurements, resistance measurements, and signal applications at low to medium speeds where no 50 Ω matching is required.
The Model 7A is supplied as standard with a flexible 2 m coaxial cable. For capacitance measurements, GGB Industries recommends the shorter 1 m version. The replaceable probe tips are identical to those of Model 7.
Replaceable Tungsten Probe Tips for Wafer Pads, IC Lines, and Test Structures
Replaceable tungsten probe tips with various wire diameters from 5 µm to 175 µm are available for the PICOPROBE® Models 7 and 7A. Depending on the tip version, the tip radii range from < 0.1 µm to < 5 µm.
The suitable probe tip depends on the respective contact point: Small wire diameters and very fine tip radii are suitable for narrow IC lines, small wafer pads, and closely spaced test points. Larger wire diameters are useful when larger pads, bonding areas, or wider test structures need to be contacted.
By matching the wire diameter, tip radius, and pad size, the contact point on the pad surface can be positioned more accurately. This reduces measurement deviations that can result from varying landing positions, different contact areas, or fluctuating contact resistances.
High Temperature Probe Tips for Measurements up to 200 °C
For measurements up to 200 °C, the PICOPROBE® Model 7 and Model 7A are available with special HT probe tips. The basic technical design remains unchanged. The temperature extension is achieved through the appropriate temperature-resistant probe tips.
This allows wafer pads, IC lines, and test structures to be contacted directly at test temperature, for example on a heated wafer chuck, the temperature-controlled stage of a wafer prober.
Which PICOPROBE® 7/7A Version Fits Your Test Setup?
Not sure which version fits your test setup? The key factors are mainly measurement type, pad size, cable length, test temperature, and the existing probing environment.
We match your test requirements with the available models and support you in selecting the right configuration, from the suitable probe tip to the appropriate cable length.
Specifications
| Specification | Value |
|---|---|
| Frequency range | up to 500 MHz |
| Mounting | Suitable for micropositioners and probing systems |
| Probe tips | Replaceable tungsten probe tips |
| Shielding | Shielded guidance to within 3 mm of the tungsten tip |
| Temperature | For applications up to 200 °C |
| Cable length | approx. 2 m (optional for Model 7A approx. 1 m) |
| Probe termination | Model 7 50 Ω; Model 7A high impedance |
Options & Accessories
| Manufacturer number | Name |
|---|---|
| 7-HT | Model 7 with temperature-resistant probe tips (for applications up to 200 °C) |
| 7A-HT | Model 7A with temperature-resistant probe tips (for applications up to 200 °C) |
| 7-5 | Tungsten replacement tip, tip size 5 µm, tip radius < 0.1 µm |
| 7-10 | Tungsten replacement tip, tip size 10 µm, tip radius < 0.2 µm |
| 7-22 | Tungsten replacement tip, tip size 22 µm, tip radius < 1.0 µm |
| 7-35 | Tungsten replacement tip, tip size 35 µm, tip radius < 2.0 µm |
| 7-60 | Tungsten replacement tip, tip size 60 µm, tip radius < 3.0 µm |
| 7-125 | Tungsten replacement tip, tip size 125 µm, tip radius < 5.0 µm |
| 7-172 | Tungsten replacement tip, tip size 175 µm, tip radius < 5.0 µm |
| 7-5-HT | Tungsten replacement tip, tip size 5 µm, tip radius < 0.1 µm |
| 7-10-HT | Tungsten high-temperature replacement tip, tip size 10 µm, tip radius < 0.2 µm |
| 7-22-HT | Tungsten high-temperature replacement tip, tip size 22 µm, tip radius < 1.0 µm |
| 7-35-HT | Tungsten high-temperature replacement tip, tip size 35 µm, tip radius < 2.0 µm |
| 7-60-HT | Tungsten high-temperature replacement tip, tip size 60 µm, tip radius < 3.0 µm |
| 7-125-HT | Tungsten high-temperature replacement tip, tip size 125 µm, tip radius < 5.0 µm |
| 7-172-HT | Tungsten high-temperature replacement tip, tip size 175 µm, tip radius < 5.0 µm |
| 7A-3ft | Shorter coaxial cable for Model 7A as an ordering option for capacitance measurements, length |
Scope of Delivery
| Scope of delivery |
|---|
| Model 7 or 7A probe |
| Probe tip in the ordered version |
| Coaxial cable in the ordered version |
Applications
| Application examples | |
|---|---|
| Wafer probing systems | Suitable for use in probing systems and on micropositioners |
| High-temperature probing | With HT probe tips for contact up to 200 °C |
| Model 7 | |
| On-wafer signal drive | Contacting and feeding signals into IC lines and test structures |
| 50 Ω test setups | Applications requiring a defined 50 Ω termination to reduce reflections |
| Circuit-level IC testing | Driving individual nodes to evaluate adjacent circuit areas |
| High-temperature probing | With HT probe tips for contact up to 200 °C |
| Model 7A | |
| Wafer probing systems | Suitable for use in probing systems and on micropositioners |
| Capacitance measurements | Measurements on IC lines, wafer pads, and test structures |
| Resistance measurements | Contacting for high-impedance or non-50 Ω terminated test setups |
| Low- to medium-speed signal applications | Signal applications where no 50 Ω termination is required |
| High-temperature probing | With HT probe tips for contact up to 200 °C |
Links & Downloads
Supplier
GGB Industries, der Erfinder der Picoprobe®-Produktlinie von Mikrowellen- und Oszilloskop-Tastköpfen, liefert bereits seit 1980 Messköpfe für On-wafer Messungen für die Halbleiterindustrie, beginnend mit einer Reihe hochohmiger Sonden für die Fehlersuche bei der Diagnose der internen Funktionsweise komplexer Logik- und Speicherchips. Seitdem hat GGB eine beeindruckende Anzahl an neuen, patentierten Lösungen entwickelt. Man kann also mit Fug und Recht behaupten, dass GGBs Stärken insbesondere handwerkliches Können, Präzision, Kundendienst und Problemlösung sind.
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